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High Vacuum Magnetron Sputtering Coater with Evaporation Coater Two in One Machine1
Laboratory InstrumentsSputtering CoaterVacuum Evaporation Coater
Luoyang Kunsheng Instrument Equipment Co.,Ltd
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Product Description Product DescriptionKS-1HD-EVP magnetron sputtering system is designed for the deposition of single or multilayer metallic films, conductive coatings, semiconductor films, dielectric coatings, etc.It adopts a top-mounted rotatable main target and two bottom tilted targets configuration, supporting either simultaneous or independent sputtering.Equipped with a high-efficiency molecular pumping system, it offers excellent vacuum performance and features substrate heating, substrate rotation, and film thickness monitoring.It is widely used in materials science, electronic devices, optical coatings, and small-scale production.Technical Parameters:Product model KS-1HD-EVP sputtering and evaporation coaterChamber Size φ324×330mmUltimate Vacuum 8.0×10-5PaLeak Rate 2.0×10-10 Pa·m3/sChamber Material 304 stainless steel (electropolished inner surface)Sealing Method Rubber O-rings for movable parts, copper gaskets for fixed partsPumping System 240L/s molecular pump + backing pumpPumping Time Less than 30 minutes from atmosphere to 8.0×10 PaTarget Configuration 1 rotatable top target, 2 bottom tilted targets (1 installed as standard)Target Size 2 inches (φ50.8mm)Target Power <240W per target, total >2000W (two 500W DC power supplies standard)Target Utilization >35% (based on 3mm-thick aluminum film at 0.5Pa pressure)Bias Voltage Output AC 0-8V continuously adjustableMaximum Output Current 200AMaximum Bias Power <1.6kWBias Type DC (non-pulsed)Mass Flow Controllers 3 channels (0-50SCCM)Substrate Size φ120mmMaximum Substrate Heating Temperature 500°CSubstrate Rotation Speed 1-20rpmSubstrate Lifting Stroke 50mm (electric lifting)Film Thickness Monitor Model KS-TM106 (Optional)Thickness Measurement Range 0-500,000? (gold film)Measurement Resolution 0.03HzMeasurement Accuracy 0.0136?Operating Frequency 6MHzSensor Dimensions 90mm × 50mm × 18mmCooling System External circulating water chiller required (optional)Power Supply AC220V / 50Hz, total system power <3.5kWSystem Dimensions 1100mm × 650mm × 1100mmSystem Weight Approx. 160kg
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