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Sputtering of ITO (Indium Tin Oxide) Continuous Sputtering for Uniform Coating System1
Glass Machine, Uniform Coating, Sputtering Coating System
Xiangtan Hondson Coating Technology Co., Ltd.
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Product Description Sputtering of ITO (Indium Tin Oxide) Continuous Sputtering For Uniform Coating System ITO Magnetron Sputtering Coating Line: Precision, Efficiency, and Innovation Empowering Precision with Advanced ITO Coating Technology Coatings for Electronics, Solar, and Automotive Industries 2. Introduction: Why Choose Our ITO Magnetron Sputtering Line? Our ITO magnetron sputtering coating line delivers nanometer-level uniformity, unmatched adhesion strength, and 24/7 production efficiency-engineered to meet the stringent demands of clients. 3. Technical Superiority: Uniformity & Precision: Patented dual-target rotation system ensures high uniformity across substrates, critical for touchscreens and solar cells. Adhesion & Durability: High-energy plasma deposition achieves 10x stronger film adhesion than evaporation methods, surviving extreme temperatures (-40°C to 200°C). Scalability & Speed: Modular design supports batch or inline production, with throughput up to 1,500 substrates/hour-ideal for high-volume facilities. 4. Applications Tailored to your Industries Consumer Electronics: ITO-coated flexible displays for smartphones. Solar Energy Heat-reflective windshields for Tesla, Ford, and GM-meeting ASTM D4328 standards. 5. Call to ActionITO (Indium Tin Oxides) as nano-indium tin metal oxide, has good electrical conductivity and transparency, can cut off harmful to the human body electron radiation, ultraviolet and far infrared. Therefore, after spraying on glass, plastic and electronic display screen, in the enhanced conductivity and transparency at the same time cut off the harmful electronic radiation and ultraviolet, infrared. The coating equipment is in the high-quality float glass using vacuum magnetron sputtering technology, twin cathode, IF sputtering technology, and with the international advanced control system, plating SO2 / ITO film, the production process all automatic, continuous.Technical characteristics of ITO film coating production line1) Vacuum chamber material using SUS304, vacuum chamber wall for polishing, the outer wall after polishing with beads treatment.2) between the vacuum chamber with independent door valve - flap valve separated, you can achieve effective partition, stabilize the process gas. At present, our company uses the flap valve design, it is more than the current domestic common flap valve seal better and more durable.3) transmission using magnetic guidance, to ensure the stability of transmission. The entire production line of the speed of each section using frequency control motor drive, running speed can be adjusted.4) electrical control system: touch screen and PLC automatic control, man-machine dialogue mode to achieve the system data display, operation and control technical parameters1) Ultimate vacuum pressure: 6 × 1 0E-4 Pa2) the average production cycle: according to product identification3) Substrate size: can be customized according to requirements4) Film uniformity: ± 3% Advanced mobile magnetic field technology greatly improved target utilizationSegmented heating design, is conducive to process optimization. Products are widely used in liquid crystal display (LCD), touch screen, solar cells, microelectronics ITO conductive film glass, optoelectronics and a variety of optical fieldsSputtering lineStructure of the magnetron sputtering coating line The vacuum coating production line is usually connected by more than three vacuum chambers to form a continuous working vacuum coating machine.Advantages of this vacuum coating line are:Extremely high vacuum, high film qualityCoating film quality is stableHigh productivityHigh degree of automation, fewer operator requirementsThe vacuum coating line is mainly used for film coating on flat glass, acrylic, PC, PET substrates, various metal films, dielectric films, dielectric metal composite films, transparent conductive films and other film applications.The industries involved in the vacuum coating line include the surface coating of plastic panels and display screens in mobile phones, electronics, home appliances and other industries.The vacuum coating production line adopts molecular pump or diffusion pump to form advanced design with atmosphere isolation. The equipment uses turbo floating molecular pump to obtain high efficiency isolation, stable pumping speed and uniform gas distribution. In the case of pumping with a diffusion pump, the vacuum pumping rate is high and the equipment production cost is lower. Vertical magnetron sputtering coating lineA normally complete continuous magnetron sputtering production line has a total of fifteen vacuum chambers, one for the chamber, one for the unload chamber, one for the buffer chamber, one for the unload buffer, one for the transfer chamber, and one for the unload chamber. Two transfer chambers; seven sputter coating chambers; four sputtering chambers can be installed at the same time in each sputter coating chamber; the high vacuum chamber is separated by a plug-in valve, and multi-function coating can be achieved by changing the atmosphere isolation effect; substrate rack operation The track uses a magnetic guided drive; the device is equipped with a turbo-buoy molecular pump and a mechanical pump for stable pumping speed and uniform gas distribution. Horizontal magnetron sputtering coating lineThe company can provide design according to user requirements, provide a full set of equipment, responsible for the process, according to "turnkey" engineering services. Magnetron sputtering cathodes Accorinf to different technical requirements of each customers, we can design different types of magnetron sputtering cathodes for the machine. This is the coating system of the machine. You can load different raw material to the cathodes for different coatings. Technical Spcifications Chamber typeVertical and horizontal method of multi-chamberApplied materialGlass and Wafer, other plastic, metal materialsSubstrate sizeVertical type2,200mm x 2,500mmHorizontal type1,500mm x 1,800mmTact time60 sec or less (Static method) 35 sec or less (Dynamic method)Coating sourceSputter sourceRotary cathode, Planar cathodeThermal sourceCrucible, E-beamCoating materialMetal materialAl, Ti, Cr, Cu, NiCr, Ni, Ag, other metal materialReactive materialTiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide materialPower supplyDC, Pulse DC, MFThickness uniformity±10% or less (Static film) ±5% or less (Moving film)Measuring instrumentSheet resistance, optic (Transmittance, reflectance, color-difference meter),plasma emission monitor, RGAHousehold appliances fieldDecorative coating on household products and exterior of mobile devicesEnergy fieldArchitectural window glass, solar cellOther industrial fieldMetal thin film and oxide thin film, multi-layered thin film coating based application field Company InformationContactIn order to help you choose the best suitable PVD coating machine, please try to reply my questions below, thanks for your cooperation.Q1: What is your product, and the max. dimension?Q2: The size of your processing material, your desired daily production capacity?
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