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Lab 2" DC Plasma Magnetron Sputtering Coater for Conductive Thin Films1
Spraying Machinery Spreading Equipment, Powder Coating Machine, Powder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description RJ-MSP300S-DC is a compact magnetron sputtering coater with one 2" target sources. DC source for coating metallic material. A film thickness tracker is included to enable the user to control processing easily. This Magnetron Sputtering Coater is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE etc. Its compactness and ease of operation make it an ideal coating system for use in R&D labs.magnetron sputtering coater technical parameters:Input Power220VAC 50/60Hz, single phase2000W (including pump)Source PowerThe power source is optional with one RF power sourceDC source: 500W for coating metallic materials (below left)Magnetron Sputtering HeadOne 2" Magnetron Sputtering Head with water cooling jackets are included to connect optional power sourceHead Water Cooling: 10ml/min water flow requiredVacuum ChamberVacuum Chamber: 300 mm Dia x 300 mm height, made of high purity quartzSample HolderSample holder size: 185mmRotate speed:1-20rpm adjustableThe holder temperature is adjustable from RT to 500oC Max with accuracy +/- 1.0oCVacuum Pump Station1.High speed turbo vacuum pump system is directly installed on the vacuum chamber for max. vacuum level 2.Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed3.Mobile pump station is included and the compact sputtering coater can be put on top of station4.Max. vacuum level: 10^-6 torr with chamber bakingThickness Monitor1.One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 ?2. LED Display Unit outside chamber can:Input material to be coated according to data base includedDisplay total thickness coated and coating speed3.5 pcs quartz sensors (consumable) are included 4.Water cooling is requiredWarrantyOne years limited warranty with lifetime support
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