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Corrosion-Resistant Multi-Material Vhb High Vacuum Flange Valve¹

Valve, Flange Valve, High Vacuum Flange Valve

Shenzhen Jiamai Automation Co., Ltd.

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Product DescriptionCorrosion-Resistant · High VacuumVHB High Vacuum Flange Valve6 AdvantagesUltra-High Vacuum Performance:External leakage rate: 1.3×10-11Pa·m3/s (He)Multi-Material Options: Stainless steel, aluminum alloy, or with bellows assemblySolenoid Valve Optional: Configurable with integrated electromagnetic valveLong Service Life: 2 million cycles certified in life testingHigh Compatibility: KF flange (ISO 2861) for universal interfacingMultiple Modes Available: Single-acting (spring return) or double-acting operationApplicationsHelium Leak DetectionLaboratory ResearchSemiconductor ManufacturingTechnical SpecificationsStandard Specifications162540506380100Valve TypeNormally Closed (NC) / Double-ActingShaft SealO-ring SealPort SizeM5Rc1/8"MediaAir, Inert Gases, VacuumTemp. Range0°C-60°CPressure Range1.3×10-4~1×10-3paPilot Pressure0.4 ~ 0.7MPaInternal Leak1.3×10-10Pa·m2/s(He)External Leak1.3×10-10Pa·m2/s(He)Conductance5L/S14L/S45L/S80L/S160L/S200L/S250L/SMaterialsBody: AL6063-T5 Aluminum, Bellows: SUS316L Stainless Steel, Seals: FKM FluorocarbonWeight0.26kg0.6kg1.27kg1.96kg3.54kg5.58kg7.15kg

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Valve: Corrosion-Resistant Multi-Material Vhb High Vacuum Flange Valve

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