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High Temperature Resistance Ceramic Filter Alumina Sic Porous Ceramic Chuck Plate Disc1
Fixture Clamping Device, Porous Ceramic Wafer for Vacuum Chuck
Vacuum, Porous Ceramic Vacuum Chuck
Xiamen Innovacera Advanced Materials Co., Ltd.
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Product Description Porous Ceramic Chuck Table Plate for Vacuum Chuck The ceramic chuck table is applied to the fields ofsilicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor packagecomponent substrate, optical component thinning, cutting and so on. Main Appication field:· New, and refurbished, porous ceramic chucks for Disco, K&S, Applied materials TSK, Micro Automation,LoadPoint etc dicing saws and grinders · 4",5",6",8,"12" regular size available in round, square, oval shape or irregular shapes and sizes INNOVACERA porous ceramic vacuum chucks are available for for thin film substrates and flat fragile materials with different shapes and sizes.The superb flat surface of porous ceramic distributes the vacuum force equally tomitigate potential deflection.We have developed: Dicing Chucks Transparent Chucks Cleaning Chucks Printing Chucks Thinning Chucks Alumina Porous Ceramic Material PropertiesPropertiesUnitsValuealumina(Al2O3)wt%≥ 80silicon dioxide(SiO2)wt%16-18densityg /cm32.3-2.5hardness (HRA)HRA ≥50.00flexure strengthMPa ≥40.00compressive strength≥600.00porosity%40.00Pore sizeμm30.00working pressureMPa ≤10.00acid resistancemg/cm2 ≤10.00alkali resistancemg/cm2 ≤20.00
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