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10kw Mpcvd Manufacturer for High Production Diamond Grown1
Laboratory InstrumentsTube Furnace for DiamondDiamond Grown Furnace
Zhengzhou Tainuo Film Materials Co., Ltd.
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Product Description Mpcvd Equipment for Diamond Grown Production and Lab Application Product DescriptionMPCVD single crystal diamond deposition equipment for laboratory ApplicationPreparation of high-quality single crystal diamond, Diamond Grown;Preparation of high-quality polycrystalline free-standing diamond films;Preparation of high quality polycrystalline diamond films;Preparation of various carbon nano films such as graphene, carbon nanotubes, fullerenes and diamond films.Features:a. Stainless steel cavity type 10kw microwave plasma equipment, high power density;b. The water-cooled substrate stage and the water-cooled metal chamber ensure the system can work stably for a long time;c. The substrate temperature is achieved by microwave plasma self-heating;d. The vacuum measuring instrument adopts a full-range vacuum gauge, which can accurately measure the background vacuum and working gas pressure;e. The vacuum pump and valve adopt turbo molecular pump (the ultimate vacuum is 1×10-5Pa) and the rotary vane mechanical vacuum pump (the ultimate vacuum is 1Pa), and the system can automatically control the deposition pressure;f. Cooling water circulation system to ensure long-term safe and stable operation of the device under high power;g. 15-inch touch screen, PLC automatic control, can set the temperature or pressure to be constant, can save and reuse up to 20 sets of process files;H. Fully automatic process control module, which can stably and reliably prepare high-quality diamond films and crystals.Advantages:1) High production efficiency, large output, high quality, the size 7*7,8*8,10*10,12*12,15*15 can be installed at one time. It can produce about 250 ~480 carats rough diamonds per month.2) The equipment has reached industrial production. The molybdenum stage is 90mm large, with fast growth speed, high yield rate and good stability.The precision and quality of the processed components are extremely high, and the processing quality of our equipment is quite exquisite.3) The equipment is currently the first main equipment at home and abroad that can achieve industrialized production of single crystal diamond. Equipped with advanced production technology to ensure customers produce qualified products.The clarity can reach vs,vvs. The color can reach D,E,F,G level according to customers' requirements. Product Parameters eVacuumVacuum measurementPiezoresistive gauge 0.1-100kpa Capacitance gauge 0-1000PaOperating pressure range4-30KpaVacuum leakage rate <1*10-9 Pa · m 3 / sPressure controlAuto-ControlCavity materialAluminum alloy excitation chamber, quartz vacuum chamberObservation windowTemperature measuring hole with diameter of 10mm and observation window of porous holeCooling modeCooling modeWater cooling+chamber air coolingSample table sizeMolybdenum stage Φ 85mm, uniform area Φ 50mmTemperature measurementInfrared thermometer, range 300-1400 oCCooling water flow>50L/minCooling water temperature20-22oCCooling water interface1-inch outer wire interfaceOperating systemOperating systemPLC control, 15 inch touch screen controlProcess Menu10 process menus, 25 lines for eachMicrowave and power supplyMicrowave frequency2.45±0.1GHzOutput power1.5-10Kw (equipped with 10kw domestic microwave power supply)Input power electricity380 Ac/50Hz, three-phase five wire (3 * 10+2 * 6 power line),>15KwMicrowave leakage rateMicrowave leakage rate 5cm away from the equipment ≤ 5Mw/cm2Process gasFlowmeter and interfaceH2 (1000SCCM) CH4 (50SCCM) N2 (10SCCM) O2 (10SCCM) 1/4 "VCR female compressed air 8mm Pu tube quick plugThe flowmeter can change the type of gas used through softwareAir supply pressure0.3-0.35MPaCompressed air pressure0.5-0.6MPaVacuum pumpRotary vane vacuum pumpOil pumpPumping speed4L/SPower supplyAc 380V(±10%)InterfaceAir extraction KF25, air exhaust KF25Operating environmentAmbient temperature and humidityThe room temperature is lower than 26 oC and the humidity is lower than 40%Overall dimensions of equipmentSize1250(L)×800(W)×2100(H)mmEquipment acceptance conditions:1. Equipment installation: After the equipment installation is completed, Party A and Party B shall conduct on-site commissioning, and Party B's technicians shall conduct equipment operation, safety and maintenance training for the person in charge of Party A.2. System test: The system can be started and operated normally, and the detached fireball is stable without jumping.3. Microwave leakage: the microwave leakage is less than 5mW/cm2 (the output power of the microwave source is more than 80%, 10cm away from the equipment)Equipment configuration ItemmodelQuantity(set / piece)manufacturer or originnotemicrowave source 10kW / 2450 MHz1domestic microwave transmission systemMixerMPT-2012waveguide1domestic mode converterMPM-20501domestic microwave reaction cavityDownstreamMPP-20501domestic sample table and bracket systemN / A1domesticWater cooling, one layer liftinggas flow system5 gas mass flow controller: H2, CH4, O2, N2, Ar5Japan gas vacuum valve and filter1 setJapan Gas system connection components1 setJapan vacuum systemvacuum valve and filter1Japan vacuum cavity, vacuum tube1domestic mechanical pump and vacuum valve1domestic molecular pump and supporting vacuum valve domestic measureresistance vacuum meter1domestic film vacuum meter1domestic infrared thermometer1domestic electric control systemPLC1Germany touch screen1domestic water cooling systemcooling water temperature,flow monitoring3Japan Control box / cabinet 1domestic voltage stabilizing power supply Requires user configurationcirculation chiller Requires user configurationgas cylinder,stainless steel gas pipe, water pipe,power distribution,exhaust pipe Requires user installation Detailed Photos Equipments Photos: Company Profile FAQQ. Are you a manufacturer or a trading company?A. We are professional instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.Q. How is your company's product after-sales service system?A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. Which usually takes 30-60 days depending on the specifications of the custom instrument.Q. Our country's power supply and plug are different. How do you solve it?A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.Q. How to pay?A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.Q. How is the package of goods? Delivery methods?A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements to find the most suitable way.More questions, please FEEL FREE to contact me.Welcome to our factory for visiting.A large number of high-quality equipment are currently available at low prices.
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