CIPDB › China Industry › Chemicals › Laboratory Instruments

1200c Low Vacuum CVD Tube Furnace with Gas Flow Meter¹

Preview:

Product Description 1200C Low Vacuum CVD Tube Furnace with Gas Flow MeterProduct Description 1. This CVD system is specially designed for graphene production, using a 1200oC mini tube furnace, equipped with a high- precision mass flow meter and a thin-film vacuum gauge.2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the type of gas, which is very suitable for the vacuum coating process.3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.Product ParametersSpecifications of CVD with 1200C tube furnace1200oC Mini CVD Tube FurnaceSupply voltageAC220V, 50HzMaximum power2KWHeating zoneSingle heating zone 200mmConstant temperature zone length100mmHeating elementHeat-resistant alloy wireThermocoupleType KOperating temperature≤1150oCHeating rateSuggest ≤10oC/minTemperature control accuracy±1oCTemperature control methodAI-PID 30-segment process curve, with overheat and burnout protectionFurnace tube materialHigh purity quartzFurnace tube sizeφ50mm O.D x 450mm LVacuum pumpMechanical pump pumping speed 1.1L/sUltimate vacuum5PaThree-channel mass flow meter parametersValve typeStainless steel needle valveNumber of gas pathsThreePressure range0.05~0.3MPaRangeAr 0~500sccmH2 0~200sccmCH4 0~10sccmFlow control range±1.5%Mixing tank volume750mLGas path material304 stainless steelPipe interface6.35mm ferrule connectorPower supplyAC220V 50HzDetailed Photos 1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.5. Tube with different diameter and length is customizable.6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.Company ProfileZhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!Packaging & ShippingWe can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.FAQQ. Are you manufacturer or trading company?A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. Q. How's your warranty?A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.Q. Power supply and plug?A. We can provide products accroding to your local voltage and plug standard.Q. How to pay?A. T T, L / C, D / P, etc.Q. How is the package of goods? Delivery methods?A. Standard export fumigation sign wooden box packaging or as your requirements.Contact UsSHALL WE DISCUSS YOUR PROJECT?Please get in touch and we can collaborate to get you the answers and solutions you need.How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.

× More Keyword ..

× More Menu ..

×

Manufacturing & Processing Machinery

×

Industrial Equipment & Components

×

Tools & Hardware Products