1200c Plasma Enhanced Chemical Vapor Deposition Vacuum Tube Furnace¹

Product Description 1200C Plasma Enhanced Chemical Vapor Deposition PECVD Vacuum Furnace  Product DescriptionPlasma enhanced CVD machine consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.applications:This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc. Product Parameters heating zone tube furnaceModelTN-O1200-50IIITTube materialHigh purity quartzTube diameter50mmTube length2830mmFurnace chamber length660mmHeating zone length200mm+200mm+200mmOperating temperature0~1100oCTemperature control accuracy±1oCTemperature control mode30 or 50 segment program temperature controlDisplay modeLCDSealing method304 stainless steel vacuum flangeFlange interface1/4" ferrule connector, KF16/25/40 jointVacuum4.4E-3PaPower supplyAC:220V 50/60HzSingle-heating zone tube furnaceModelCY-O1200-50ITTube materialHigh purity quartzTube diameter50mmTube length2830mmFurnace chamber length440mmHeating zone length400mmConstant   temperature zone200mmOperating   temperature0~1100oCTemperature control accuracy±1oCTemperature control mode30 or 50 segment program temperature controlDisplay modeLCDSealing method304 stainless steel vacuum flangeFlange interface1/4" ferrule connector, KF16/25/40 jointVacuum4.4E-3PaPower supplyAC:220V 50/60HzRF output systemPower range0~500W adjustableWorking frequency13.56MHz+0.005%Working modeContinuous outputDisplay modeLCDMatched impedance modeCan match, the glow is evenly covered with three heating zone furnace tubesPower stability≤2WNormal working reflected power≤3WAmplified reflected power≤70WHarmonic component≤-50dBcMachine efficiency≥70%Power Factor≥90%Supply voltage / frequencySingle-phase AC (187V~153V) Frequency 50/60HzControl modeInternal control / PLC analog / RS232 / 485 communicationPower protection settingsDC overcurrent protection, power amplifier over temperature protection, reflected power protectioncooling methodForced air coolingGlow lengthIn the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones.Gas supply systemFour-channel mass flowmeterMass flowmeterFlow rangeMFC1 range: 0~200sccm MFC2 range:   0~200sccmMFC3 range: 0~500sccm MFC4 range: 0~500sccmCorresponding to gases H2, CH4, N2, Ar,measurement accuracy±1.5%F.SRepeatability±0.2%FSLinear precision±1%F.S.Response time≤4sWork pressure-0.15Mpa~0.15Mpaflow controlLCD touch screen control, digital display, each-channel gas contains a needle valve for individual controlIntake interfaceCan be connected to 1/4NPS or 6mm outer   diameter stainless steel tubeOutlet interfaceCan be connected to 1/4NPS or 6mm outer   diameter stainless steel tubeConnection methodDouble ferrule connectorOperating temperature5~45oCGas premixEquipped with gas premixing deviceExhaust systemMechanical pumpRotary vane pumpPumping rate1.1L/S Exhaust interfaceKF16Vacuum measurementResistance gaugeUltimate vacuum1.0E-1PaPower supplyAC:220V 50/60HzPumping interfaceKF16RailRail length2.5m~3mIt can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall.  Detailed PhotosRelated photos of PECVD Vacuum Furnacetube furnace Company Profile FAQQ. Are you a manufacturer or a trading company?A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.Q. How is your company's product after-sales service system?A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.Q. Our country's power supply and plug are different. How do you solve it?A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.Q. How to pay?A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.Q. How is the package of goods? Delivery methods?A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.More questions, please contact me. 

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