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Three-Zone Rotary CVD Tube Furnace with Continuous Powder Feeding System1
Laboratory InstrumentsCVD Tube FurnaceRotary CVD Furnace
Zhengzhou Tainuo Film Materials Co., Ltd.
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Product Description Lab Three-Zone Rotary CVD Furnace with Continuous Powder Feeding SystemProduct Description 1. This CVD system is specially designed for graphene production, using a 1200oC mini tube furnace, equipped with a high- precision mass flow meter and a thin-film vacuum gauge.2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the type of gas, which is very suitable for the vacuum coating process.3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.Product ParametersSpecifications of CVD tube furnaceTwo heating zone tube furnaceProduct modelTN-PE-HPCVD-50R-1100-QFurnace tube materialHigh purity quartzTube diameter50mmFurnace tube length1200mmFurnace chamber length440mmHeating zone length200mm+200mmOperating temperature0~1100oCTemperature control accuracy±1oCTemperature control mode30 or 50 segment program temperature controlDisplay modeHD full color LCD touch screenSealing method304 stainless steel vacuum flangePower supplyAC: 220V 50/60Hz 2.5kwRF output systemPower range0~500W adjustableworking frequency13.56MHz+0.005%Working modeContinuous outputMatched impedance modeIt can be matched, and the glow is evenly distributed throughout the furnace tubePower stability≤2WNormal working reflected power≤3WAmplified reflected power≤70WHarmonic component≤-50dBcOverall efficiency≥70%Power Factor≥90%Supply voltage/frequencySingle-phase AC (187V~153V) frequency 50/60HzControl modeInternal control/PLC analog quantity/RS232/485 communicationPower protection settingsDC over current protection, power amplifier over temperature protection, reflected power protectionCooling methodForced air coolingGlow zoneUnder Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tubeEvaporation boatWorking temperature1300oCEvaporation sourceTungsten wire basket, optional tapered alumina crucibleThermocoupleS type thermocoupleWorking current≤30AMax. power500WGas delivery systemFlowmeterFour-channel mass flowmeterFlow rangeMFC1 range: 0~200sccm MFC2 range: 0~200sccmMFC3 range: 0~500sccm MFC4 range: 0~500sccmCorresponding to gases H2, CH4, N2, Ar.Measurement accuracy±1.5%F.SRepeatability±0.2%FSLinear accuracy±1%F.S.Response time≤4sWork pressure-0.15Mpa~0.15MpaFlow controlLCD touch screen control, digital display, each channel gas contains needle valve for individually control.Intake InterfaceIt can be connected with 1/4NPS or 6mm outer diameter stainless steel pipeOutlet InterfaceIt can be connected with 1/4NPS or 6mm outer diameter stainless steel pipeConnection methodDouble ferrule connectorOperating temperature5~45oCGas premixEquipped with gas premixing deviceExhaust systemProduct modelTN-GZK103-AMolecular pumpTurbomolecular pumpBacking pumpTwo-stage rotary vane pumpPumping rateMolecular pump: 600L/SComprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3PaRotary vane pump: 1.1L/SUltimate vacuum5×10E-4PaPumping portKF40Exhaust interfaceKF16Vacuum measurementCompound vacuum gauge Detailed Photos1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.5. Tube with different diameter and length is customizable.6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.Company ProfileZhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!Packaging & ShippingWe can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.FAQQ. Are you manufacturer or trading company?A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. Q. How's your warranty?A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.Q. Power supply and plug?A. We can provide products accroding to your local voltage and plug standard.Q. How to pay?A. T T, L / C, D / P, etc.Q. How is the package of goods? Delivery methods?A. Standard export fumigation sign wooden box packaging or as your requirements.Contact UsSHALL WE DISCUSS YOUR PROJECT?Please get in touch and we can collaborate to get you the answers and solutions you need.How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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