5800 Series Digital High Precision Small Full Scale Thermal Gas Mass Flow Controller and Meter¹

Product Description APPENDIX 2  SPECIFICATIONS 5800 Digital UP TO 50SLM MASS FLOW CONTROLLER/METERModel 5800Full Scale Range (N2 eqv.)2 SCCM - 50 SLMControl ValveNormally closed/Normally OpenFitting1/4"VCR or 1/4" Swagelok CompatibleSealFKM SealFKMMetal/All Metal SealNiResponse Time≤0.8 secAccuracy≥25% F.S.≤±1% S.P.<25% F.S.≤± 0.25% F.S.Linearity≤±0.5%  F.S.(≥30SLM: ≤1%)Repeatability≤±0.1%  F.S.Operating Differential Pressure2 SCCM - 5 SLM0.05 - 0.28 MPa6 SLM - 50 SLM0.1 - 0.28 MPaLeak IntegrityFKM SealMax 1x10-9Pa.m3/sec (He)Metal/All Metal SealMax 1x10-11Pa.m3/sec (He)Control Range2-100% F.S.Max operating Pressure0.48 MPaProof Pressure1 MPaCommunication TypeDigital: RS-485 / Analog: DC 0-5VPower Supply±15VDC+15VDC ±2% 25mA-15VDC ±2% 180mA+12VDC - +32VDC+12VDC 500mA - +32VDC 180mAOutput SignalDigital: RS-485 / Analog: DC 0-5VPower Consumption±15VDC3.1W+12VDC - +32VDC6WOperation Temperature5-45 Deg CMaterialFKM SealSUS316L, FKM, PTFE, Electromagnetic stainless steelMetal Metal SealSUS316L, Ni, PTFE, Electromagnetic stainless steelAll Metal SealSUS316L, Ni, Electromagnetic stainless steelSurface FinishFKM Seal≤5RAMetal SealTC,≤5RAWeightappr. 0.8 KG5800 Digital UP TO 150SLM MASS FLOW CONTROLLER/METERModel 5800Full Scale Range (N2 eqv.)50 SLM - 150 SLMControl ValveNormally closed/Normally OpenFitting3/8"VCR or 1/2" Swagelok CompatibleSealFKM SealFKMMetal/All Metal SealNiResponse Time≤2 secAccuracy≤±1.5% F.S.Linearity≤±0.5%  F.S.Repeatability≤±0.2%  F.S.Leak IntegrityFKM SealMax 1x10-9Pa.m3/sec (He)Metal/All Metal SealMax 1x10-11Pa.m3/sec (He)Control Range2-100% F.S.Max operating Pressure0.48 MPaProof Pressure1 MPaCommunication TypeDigital: RS-485 / Analog: DC 0-5VPower Supply±15VDC+15VDC ±2% 25mA-15VDC ±2% 180mA+12VDC - +32VDC+12VDC 500mA - +32VDC 180mAOutput SignalDigital: RS-485 / Analog: DC 0-5VPower Consumption±15VDC3.1W+12VDC - +32VDC6WOperation Temperature5-45 Deg CMaterialFKM SealSUS316L, FKM, PTFE, Electromagnetic stainless steelMetal Metal SealSUS316L, Ni, PTFE, Electromagnetic stainless steelAll Metal SealSUS316L, Ni, Electromagnetic stainless steelSurface FinishFKM Seal≤5RAMetal SealTC,≤5RAWeightappr. 1.8 KG5800 Digital UP TO 300SLM MASS FLOW CONTROLLER/METERModel 5800Full Scale Range (N2 eqv.)100 SLM - 300 SLMControl ValveNormally closed/Normally OpenFitting3/8"VCR or 1/2" Swagelok CompatibleSealFKM SealFKMMetal/All Metal SealNiResponse Time≤ 2 secAccuracy≤± 2% F.S.Linearity≤±0.5%  F.S.Repeatability≤±0.2%  F.S.Operating Differential Pressure100 SLM - 150 SLM0.15Mpa - 0.3 MPa150 SLM- 200 SLM0.18Mpa - 0.3 MPa200 SLM - 300 SLM0.21Mpa - 0.3 Mpa MPaLeak IntegrityFKM SealMax 1x10-9Pa.m3/sec (He)Metal/All Metal SealMax 1x10-11Pa.m3/sec (He)Control Range2-100% F.S.Max operating Pressure0.48 MPaProof Pressure1 MPaCommunication TypeDigital: RS-485 / Analog: DC 0-5VPower Supply±15VDC+15VDC ±2% 25mA-15VDC ±2% 180mA+12VDC - +32VDC+12VDC 500mA - +32VDC 180mAOutput SignalDigital: RS-485 / Analog: DC 0-5VPower Consumption±15VDC3.1W+12VDC - +32VDC6WOperation Temperature5-45 Deg CMaterialFKM SealSUS316L, FKM, PTFE, Electromagnetic stainless steelMetal Metal SealSUS316L, Ni, PTFE, Electromagnetic stainless steelAll Metal SealSUS316L, Ni, Electromagnetic stainless steelSurface FinishFKM Seal≤5RAMetal SealTC,≤5RAWeightappr. 1.93 KG5800 Digital UP TO 2000SLM MASS FLOW CONTROLLER/METERModel 5800Full Scale Range (N2 eqv.)300 SLM - 2000 SLMControl ValveNormally closed/Normally OpenFitting3/4"VCR or 1" Swagelok CompatibleSealFKM SealFKMResponse Time≤ 2 secAccuracy≤± 2% F.S.Linearity≤± 1%  F.S.Repeatability≤± 0.25%  F.S.Operating Differential Pressure0.25Mpa - 0.7 MPaLeak IntegrityFKM SealMax 1x10-9Pa.m3/sec (He)Control Range2-100% F.S.Max operating Pressure0.7 MPaProof Pressure3 MPaCommunication TypeDigital: RS-485 / Analog: DC 0-5VPower Supply±15VDC+15VDC ±2% 25mA-15VDC ±2% 180mA+12VDC - +32VDC+12VDC 500mA - +32VDC 180mAOutput SignalDigital: RS-485 / Analog: DC 0-5VPower Consumption±15VDC3.1W+12VDC - +32VDC6WOperation Temperature5-45 Deg CMaterialFKM SealSUS316L, FKM, PTFE, Electromagnetic stainless steelSurface FinishFKM Seal≤5RAMetal SealTC,≤5RAWeightappr. 5.22 KG APPENDIX 3  SELECTION GUIDE 5800 Digital UP TO 50SLM MASS FLOW CONTROLLER/METERModelDigital Communication58         SeriesStandard model 00        Product Type Mass Flow Controller  FC       Mass Flow Meter  FM       SealFKM   R      Metal   M      All Metal   T      CommunicationDigital (RS485/Modbus)& Analog 9pin/±15v    RN     Digital (RS485/Modbus)& Analog 9pin/12-32v    RV     Digital (RS485/Modbus)& Analog 9pin/±15v LCD     RM     Digital (RS485/Modbus)& Analog 9pin/12-32v LCD     RW     Control ValveNormally Closed     C    Normally Open(*1)     O    TemperatureStandard 5-45 Deg C      S   High Temperature*      H   Fitting(*2)1/8" VCR       E2V  1/4" VCR       E4V  1/8" Swagelok Compatible       E2S  1/4" Swagelok Compatible       E4S  3/8" Swagelok Compatible       E6S  1/2" Swagelok Compatible       E8S  1" Swagelok Compatible       EGS  6mm LOK       G6S  10mm LOK       GXS  6mm Tube Quick connctor       G6T  IGS 1.125"C-SEAL       IGC  IGS 1.125"W-SEAL       IGW  GASGas        N2 Full ScaleFlow Rate         100 SCCMEXAMPLE  MFC:5800-FCRRNCS-E4V-N2-100SCCM  /  MFM:5800-FMRRNS-E4V-N2-100SCCM(*1) For customized models, please contact your sales representative.(*2) For more fitting options, please contact your sales representative.(*3) Flow rate is calibrated (N2 eqv.) at standard temperature and pressure. (Standard: 0 Deg C and 101kPa)(*4)5800 digital RS-485 model is available with analog model (DC 0-5V)(*5)More requirement of Electrolytic Polishing or Passivating , please contact your sales representative.(*6) Temperature for High Temperature models can be customized.  

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