High-Speed Lab Wafer Spin Coater for Thin Film Deposition and Semiconductor Research¹

Product Description The KS-SP-PM4 is a high-performance spin coater designed for precision coating applications in laboratories and research institutions. It operates on an AC220V, 50Hz power supply and is capable of reaching spin speeds from 0 up to 10000rpm, with a fine speed resolution of 1rpm. The acceleration range is adjustable between 100 and 5000rpm/s, allowing for versatile coating processes suited to a wide range of materials and requirements.The device features a high-quality PMMA chamber, ensuring excellent chemical resistance and durability during high-speed spinning. The substrate size accommodates samples with a diameter of up to 4 inches (100mm), making it ideal for various wafer and substrate types.The KS-SP-PM4 offers a simple yet effective control interface, utilizing buttons and an LCD screen for easy operation. Material dispensing is manual by default, with an option to integrate a precision syringe pump for more controlled and automated processes.To enhance process flexibility, the coater supports programmable coating curves - up to 5 segments per curve, and users can set a total of 5 different curves according to specific experimental needs. The system is equipped with a Φ6mm quick screw joint pumping port and utilizes a dry mechanical pump with a pumping rate of 1.1L/s to maintain the required vacuum level during operation.Designed for high precision, durability, and ease of use, the KS-SP-PM4 spin coater is an ideal choice for applications in semiconductor fabrication, materials science research, and thin-film processing.Technical Parameters:Model KS-SP-PM4 spin coaterSupply voltage AC220V, 50HzSpin speed 0~10000rpmAcceleration 100~5000rpmSpeed resolution 1rpmSingle step time 3000sSubstrate size Diameter ≤ 4 inches (100mm)Chamber material QuartzOperation method Button + LCD screenDispensing method Manual dispensing, optional precision syringe pumpCoating curve 5 segments per curve, a total of 5 curves can be setPumping port Φ6mm quick screw jointOverall size 210mm × 250mm × 180mmTotal weight 8kgVacuum pump Dry mechanical pumpPumping rate 1.1L/s 

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