Compact 13.56 MHz Plasma Cleaning System/Cleaner with Quartz or Stainless Steel Chamber¹

Product Description KS-PL-5ST Plasma Cleaning System - Compact, High-Frequency Plasma Cleaner for Advanced ApplicationsThe KS-PL-5ST is a compact, high-performance plasma cleaning system designed for precise surface treatment in laboratory and small-scale industrial applications. Featuring a 5-liter chamber and operating at a standard RF frequency of 13.56 MHz, the system uses an auto-matching power supply that delivers up to 500W, ensuring stable and uniform plasma generation across various cleaning tasks.Engineered with flexibility in mind, the KS-PL-5ST supports dual chamber material options-either 316L stainless steel for durability or quartz for ultra-clean processes. Its cylindrical chamber (Φ150×270L mm) is optimized for low-temperature (<30°C) plasma processing, making it ideal for sensitive materials such as semiconductors, polymers, ceramics, and bio-compatible substrates.The system's intelligent PLC control unit and user-friendly HMI touchscreen interface enable full programmability and real-time process monitoring. Users can set adjustable parameters for power, time (up to 99999 seconds), gas flow, and vacuum level, achieving consistent and repeatable results. A dual-channel precision float flowmeter regulates process gases with exceptional accuracy, while the analog vacuum gauge provides real-time pressure readings in the 1-30 Pa range.The integrated 2XZ-4 rotary vane pump delivers a fast and stable vacuum (4 L/s), ensuring a clean and controlled environment inside the chamber. With a compact footprint (560×540×550 mm), the KS-PL-5ST can be easily installed in research labs, cleanrooms, or production facilities.Typical applications include photoresist removal, surface activation prior to bonding or coating, removal of organic residues, and fine etching or functionalization of micro/nano structures. The system is especially suitable for the treatment of precision electronics, medical devices, LED components, optical lenses, and advanced materials requiring contamination-free surfaces.Whether for R&D, process development, or small-batch production, the KS-PL-5ST offers exceptional reliability, cleanliness, and ease of use-empowering professionals with the tools needed for tomorrow's surface engineering challenges.Technical Parameters:Model KS-PL-5STCavity material 316 stainless steel surface treatment / QuartzCavity size Φ150×270L mm (stainless steel)Cavity capacity 5LOuter dimensions 560×540×550 mm (L×W×H)Power frequency 13.56 MHz (auto-matching)Power supply 0-500W (continuously adjustable)Flowmeter High precision 2-way float flowmeterVacuometer Pressure gauge (quantitative value display)Control method Fully automatic control and manual (PLC HMI interface)Cleaning time 0-99999 s adjustableVacuum level 1-30 PaChamber temperature <30°CSupply voltage 220VVacuum pump 2XZ-4 (speed 4L/S) 

OK ! We suggest you detail your product requirements and company information here.
Enter between 20 to 4,000 characters.
Your inquiry content must be between 20 to 4000 characters.