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Rotary CVD Tube Furnace for Lithium-Ion Battery Material1
Laboratory InstrumentsTube FurnaceCVD Tube Furnace
Zhengzhou Tainuo Film Materials Co., Ltd.
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Product Description Rotary CVD Tube Furnace for Lithium-Ion Battery MaterialProduct Description Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.Product ParametersSpecifications of PECVD tube furnaceRF power supplyOutput Power150WOutput accuracy±1%RF frequency13.56MHzRF stability±0.005%Cooling methodAir-cooling1200oC Single heating zone tube furnaceSupply voltageAC220V,50HzMaximum power2KWHeating zoneSingle heating zone 200mmWorking temperatureMaximum 1200 oC, continuous operating temperature should be ≤1100 oCTemperature accuracy± 1 oCTemperature control methodAI-PID 30-stage process curve, can store multipleThree temperature zone independent control, with overheat and thermocouple failure protectionFurnace tube materialHigh purity quartzFurnace tube sizeDia. 50x800mmSealing methodVacuum stainless steel flange, KF16 flangeAdjustable speed0-20rpmslope0-15°Vacuum pumpRotary vane mechanical pumpUltimate vacuum1.0E-1PaFeeding methodVacuum funnel and screw feed Detailed Photos1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.5. Tube with different diameter and length is customizable.6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.Company Profile Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!Packaging & ShippingWe can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.FAQQ. Are you manufacturer or trading company?A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. Q. How's your warranty?A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.Q. Power supply and plug?A. We can provide products accroding to your local voltage and plug standard.Q. How to pay?A. T T, L / C, D / P, etc.Q. How is the package of goods? Delivery methods?A. Standard export fumigation sign wooden box packaging or as your requirements.Contact UsSHALL WE DISCUSS YOUR PROJECT?Please get in touch and we can collaborate to get you the answers and solutions you need.How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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