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Lab Sliding Tube Furnace for CVD Graphene Preparation1
Laboratory InstrumentsTube FurnaceFurnace for CVD Graphene Preparation
Zhengzhou Tainuo Film Materials Co., Ltd.
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Product Description Lab Sliding Tube Furnace for CVD Graphene Preparation Product Description 1. The PECVD system comes with a plasma generator, a triple-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.2.The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.3. This PECVD system can be used in graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.Product ParametersSpecifications of CVD system1200oC Mini CVD Tube FurnaceSupply voltageAC220V, 50HzMaximum power2KWHeating zoneSingle heating zone 200mmConstant temperature zone length100mmHeating elementHeat-resistant alloy wireThermocoupleType KOperating temperature≤1150oCHeating rateSuggest ≤10oC/minTemperature control accuracy±1oCTemperature control methodAI-PID 30-segment process curve, with overheat and burnout protectionFurnace tube materialHigh purity quartzFurnace tube sizeφ50mm O.D x 450mm LVacuum pumpMechanical pump pumping speed 1.1L/sUltimate vacuum5PaThree-channel mass flow meter parametersValve typeStainless steel needle valveNumber of gas pathsThreePressure range0.05~0.3MPaRangeAr 0~500sccmH2 0~200sccmCH4 0~10sccmFlow control range±1.5%Mixing tank volume750mLGas path material304 stainless steelPipe interface6.35mm ferrule connectorPower supplyAC220V 50HzDetailed Photos 1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.5. Tube with different diameter and length is customizable.6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.Company ProfileZhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!Packaging & ShippingWe can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.FAQQ. Are you manufacturer or trading company?A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. Q. How's your warranty?A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.Q. Power supply and plug?A. We can provide products accroding to your local voltage and plug standard.Q. How to pay?A. T T, L / C, D / P, etc.Q. How is the package of goods? Delivery methods?A. Standard export fumigation sign wooden box packaging or as your requirements.Contact UsSHALL WE DISCUSS YOUR PROJECT?Please get in touch and we can collaborate to get you the answers and solutions you need.How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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